Austria – Laboratory, optical and precision equipments (excl. glasses) – Silicon Austria Labs –Deep Ultraviolet (DUV) Lithography Systems
Tender Description
The aim of the procurement procedure was to commission the best bidder identified in the course of the procurement procedure to supply and install a deep ultraviolet (DUV) KrF-based exposure stepper (hereinafter referred to as “stepper”) for Silicon Austria Labs GmbH.
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