Belgium – Laboratory, optical and precision equipments (excl. glasses) – CL Cathodoluminescence (CL) Tool

Cathodoluminescence (CL) tool: Clean-room compatible with EFEM (Equipment Front End Module) for automatic loading of 200 and 300 mm substrates Fast acquisition of CL and scanning electron microscopy (SEM) images on blanket and patterned wafers 800 – 1700 nm wavelength detection range Panchromatic detector for fast defect mapping Spectrum acquisition (≥250 nm range with one scan